CLASP (Capture and Locking Alignment Spring Positioner): a micromachined fiber auto-positioning device

Stanley H. Kravitz, James C. Word, Thomas M. Bauer, Pamela K. Seigal, Marcelino G. Armendariz, Vijay K. Varadan, Paul J. McWhorter
1996 Smart Structures and Materials 1996: Smart Electronics and MEMS  
456; *k' 2 l* This work provides a method of mechanical alignment of an array of single mode ( ' . , sr fibers to an array of optical devices. The technique uses a micromachined metal spring, which captures a vertical, pre-positioned fiber, moves it into accurate alignment, and holds it for attachment. The spring is fabricated from electroplated nickel, using photodefined polyimide as a plating mask. The nickel is plated about 80 pm thick, so that a large fiber depth is captured. In one
more » ... ion, the nickel springs can be aligned to optics on the back side of the substrate. This entire concept is referred to as CLASP (Capture and Locking Alignment Spring Positioner). These springs can be used for general alignment and capture of any fiber to any optical input or output device. Passive alignment of fiber arrays to +/-2pm accuracy has been demonstrated, with a clear path to improved accuracy. KEYWORD LIST micromachines, optical packaging, photonic packaging, optical fiber alignment, hermetic optical packaging, optoelectronic packaging, MEMS
doi:10.1117/12.240437 fatcat:xg76cpimdjf3hfg467rpl7rywq