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Smart Structures and Materials 1996: Smart Electronics and MEMS
456; *k' 2 l* This work provides a method of mechanical alignment of an array of single mode ( ' . , sr fibers to an array of optical devices. The technique uses a micromachined metal spring, which captures a vertical, pre-positioned fiber, moves it into accurate alignment, and holds it for attachment. The spring is fabricated from electroplated nickel, using photodefined polyimide as a plating mask. The nickel is plated about 80 pm thick, so that a large fiber depth is captured. In onedoi:10.1117/12.240437 fatcat:xg76cpimdjf3hfg467rpl7rywq