[Invite Paper] High Accuracy High Spatial Resolution and Real-Time CMOS Proximity Capacitance Image Sensor Technology and its Applications

Rihito Kuroda, Masahiro Yamamoto, Yuki Sugama, Yoshiaki Watanabe, Manabu Suzuki, Tetsuya Goto, Toshiro Yasuda, Shinichi Murakami, Yayoi Yokomichi, Hiroshi Hamori, Shigetoshi Sugawa
2021 ITE Transactions on Media Technology and Applications  
122 Recently we have presented proximity capacitance CMOS image sensors with 0.1 aF detection accuracy with advanced noise cancelling [18] [19] [20] [21] . In this paper, the proximity capacitance CMOS image sensor technology with high detection accuracy, high spatial resolution and real-time detection and its applications are presented. The proposed circuit architecture, working principles, structure and its applications will be described in detail in the following sections. Abstract This
more » ... presents a CMOS proximity capacitance image sensor technology achieving 0.1aF detection accuracy with high spatial resolution with real-time imaging capability for industrial, life science, and biometric applications. The proposed image sensor circuits, its working principle and device structures are described in this paper, and additionally, we discuss the foreseen technology roadmap. The fabricated chips with 16µm pitch pixels achieved a 0.1aF detection accuracy with the input voltage of 20V, thanks to the employed noise reduction technology. The examples of capacitance imaging using the fabricated CMOS proximity capacitance image sensor are demonstrated.
doi:10.3169/mta.9.122 fatcat:brrskk6wdzapzkywnizfkzmq2m