DESIGN AND FABRICATION OF RF-MEMS SWITCH FOR V-BAND RECONFIGURABLE APPLICATION

Thanh Mai Vu, Gaetan Prigent, Jinyu Ruan, Robert Plana
2012 Progress in Electromagnetics Research B  
This paper presents a study of RF MEMS switch designed to be integrated in tunable filters for applications from W-frequency band to V-frequency band. Along the whole process, we go into detail of each procedure to present a complete study from design to fabrication and characterization of a RF-MEMS switch. The proposed concepts are validated by experimental results.
doi:10.2528/pierb12021404 fatcat:rfarbaz4nvhflm3s2cktmfutiy