Effect of the Cu Bottom Layer on the Optical and Electrical Properties of In2O3/Cu Thin Films
구리 기저 층이 In2O3/Cu 박막의 광학적, 전기적 특성에 미치는 영향

Dae-Il Kim
2011 Applied Science and Convergence Technology  
Indium oxide (In 2 O 3 ) single layer and In 2 O 3 /copper (Cu) bi-layer films were prepared on glass substrates by RF and DC magnetron sputtering without intentional substrate heating. In order to determine the effect of the Cu bottom layer on the optical, electrical and structural properties of In 2 O 3 films, 3-nm-thick Cu film was deposited on the glass substrate prior to deposition of the In2O3 films. As-deposited In2O3 films had an optical transmittance of 79% in the visible wavelength
more » ... sible wavelength region and a sheet resistance of 2,300 Ω/□, while the In 2 O 3 /Cu film had optical and electrical properties that were influenced by the Cu bottom layer. In2O3/Cu films had a lower sheet resistance of 110 Ω/□ and an optical transmittance of 71%. Based on the figure of merit, it can be concluded that the Cu bottom layer effectively increases the performance of In 2 O 3 films for use as transparent conducting oxides in flexible display applications.
doi:10.5757/jkvs.2011.20.5.356 fatcat:p5uocathsravdl5s2y2m3z7x4u