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2015 IEEE 15th International Conference on Nanotechnology (IEEE-NANO)
Ultrasonic vibration (UV)-assisted method, as an innovative nanomachining technology, has competitive advantages compared to traditional atomic force microscopy (AFM) nanomachining methods. However, the UV-assisted machining process by AFM is still an open loop control method for cutting depth and sample mechanical properties. Furthermore, the real-time material/interface sensing is still absent when cutting on ultra-thin film. Detection method of machining object (thin film or substrate)doi:10.1109/nano.2015.7388780 fatcat:sjblubsfsndm3irjg5gcngbnj4