Interface sensing and cutting of ultra-thin film based on UV-assisted AFM

Jialin Shi, Lianqing Liu
2015 2015 IEEE 15th International Conference on Nanotechnology (IEEE-NANO)  
Ultrasonic vibration (UV)-assisted method, as an innovative nanomachining technology, has competitive advantages compared to traditional atomic force microscopy (AFM) nanomachining methods. However, the UV-assisted machining process by AFM is still an open loop control method for cutting depth and sample mechanical properties. Furthermore, the real-time material/interface sensing is still absent when cutting on ultra-thin film. Detection method of machining object (thin film or substrate)
more » ... or substrate) remains an obstacle for AFM machining. Here we introduce an ultra-thin film interface sensing and cutting method based on UV-assisted AFM to realize the material/interface detection on the process of nano-machining. This new approach for sensing and cutting ultra-thin film is validated by our experimental results conducting on ultra-thin films with different thickness at nanoscale. Keywords-atomic force microscopy; ultrasonic vibration; nanomchining; ultra-thin film; interface/material sensing I. 978-1-4673-8156-7/15/$31.00
doi:10.1109/nano.2015.7388780 fatcat:sjblubsfsndm3irjg5gcngbnj4