Surface and Cross-Sectional Views of Co-Cr Films Prepared by Facing-Targets Sputtering at High and Low Ar Gas Pressures

M. Naoe, S. Nakagawa
1989 Journal of the Magnetics Society of Japan  
Surface Crosssection Surface Crosssection Effects of an Ar gas pressure on cross sectional and surface views for Co-21at%Cr films by Facing-Targets Sputtering (FTS) system are observed by SEM. The FTS system can be operated at an Ar gas pressure as low as 0.15 mTorr. Compared with the film having a clear columnar structure, deposited at a high Ar gas pressure of 15 mTorr (Photo (b», the film prepared at an extremely low Ar pressure of 0.15 mTorr exhibits a columnless and dense structure (Photo
more » ... a». The columnless film shows higher perpendicular anisotropy than that of the columnar film because of its better crystallinity and higher c-axis orientation.
doi:10.3379/jmsjmag.13.s1_a2 fatcat:wubrwoaeoneplhph6yvgqkjt4i