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Surface Crosssection Surface Crosssection Effects of an Ar gas pressure on cross sectional and surface views for Co-21at%Cr films by Facing-Targets Sputtering (FTS) system are observed by SEM. The FTS system can be operated at an Ar gas pressure as low as 0.15 mTorr. Compared with the film having a clear columnar structure, deposited at a high Ar gas pressure of 15 mTorr (Photo (b», the film prepared at an extremely low Ar pressure of 0.15 mTorr exhibits a columnless and dense structure (Photodoi:10.3379/jmsjmag.13.s1_a2 fatcat:wubrwoaeoneplhph6yvgqkjt4i