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The ion energy distributions ͑IEDs͒ at the electrodes in a capacitively coupled 13.56 MHz plasma in CF 4 have been measured mass resolved with a Balzers quadrupole in combination with a home-built energy analyzer. Mass-resolved determination offers the possibility to compare the IED of different ions achieved in the same sheath. The IEDs have been determined at both the largest and the smallest electrode. Apart from the IEDs of the CF 4 species, the IEDs of ionic species in plasmas in argon anddoi:10.1063/1.362630 fatcat:5lumdxvrjnb6rk5q34o4j74nnq