Glass is a brittle material and any damage or modification of its surface may have a profound impact on the strength. To modify the glass surface, the precision of the instrument is determining for achieving the most reliable results. Nowadays, laser technology as a non-contact tool is employed as a glass cutting, drilling and holing tool in many applications such as sensors and optical communications. Along with high speed, flexibility, and scalability, lasers with short pulse duration can

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... k the interatomic bonds before perturbing the lattice. Among lasers, excimer micromachining lasers have some advantages in terms of surface morphology, including depth control, edge quality, and minimizing peripheral thermal damage as the ablation process is more likely to be material-removing instead of heating. This article aims to examine the interaction of krypton fluoride (KrF) excimer laser with the soda-lime silica (SLS) glass by fabricating grooves and microholes.