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Enhanced cold field emission from 〈100〉 oriented β–W nanoemitters
2004
Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena
Well-aligned -phase W͑100͒ nanorods having square-base pyramidal apexes were grown on oxidized Si͑100͒ substrate using glancing angle deposition technique with substrate rotation. The field emission characteristics of nanorods were measured using scanning tunneling microscope ͑STM͒ tip as an extraction anode. A highly confined emission current of about 23 A was obtained at a low extraction voltage of ϳ260 V at ϳ280 nm anode-cathode distance with Ͻ3% fluctuations over ϳ2 h. The Fowler-Nordheim
doi:10.1116/1.1736642
fatcat:hnvdrzwd3jefdfwlh27quxunyq