STRUCTURAL INVESTIGATION OF SPUTTERED CoCrTa/Cr RIGID DISK MEDIA USING X-RAY DIFFRACTION

MOTOHARU FUKAZAWA, YOICHIRO FURUKAWA, KATSUHISA ENDO, TAKUYA HAYASHI, HIROSHI TAKENO
1991 Analytical Sciences  
The crystalline structure of CoCrTa/Cr rigid disks was investigated by using Bragg-Brentano and grazing incidence X-ray diffraction techniques (BBXRD and GIXRD). CoCrTa files were sputtered on various thicknesses of a Cr underlayer. BBXRD and GIXRD data show that the Cr(200) and CoCrTa(11O) textures increase and the c-axis of the CoCrTa film lies in the plane of the disk as the Cr thickness is increased. These results suggest that an epitaxial correlation between CoCrTa(11O) and Cr (200) exists.
doi:10.2116/analsci.7.supple_1215 fatcat:n3ubhs2ja5frjipupalrcaycei