Integrated Micro-Electro-Mechanical System Based Micro-Heater for Gas Flow Detection: A Survey

Dr. M G Veena, JSS Science and Technology University
2020 International Journal of Engineering Research and  
In this paper, the predominant emphasis has been made on exploring different existing literatures or researches pertaining to gas-flow sensor design and its implementation with Micro-Electro-Mechanical System (MEMS). Though, the design of a gas senor and MEMS technology often depends on the selection of material and structural constructs, in this survey different literatures and allied materials, efficiency and limitations of the different materials, MEMS design etc. are discussed.
more » ... suitability of the MEMS interfaced gas sensors over different temperature or operating conditions are also discussed in this review letter. This study revealed that selection of the material based on its temperature (behavioral) dependency can be efficient to enable optimal gas sensing. Solutions like Micro-heater MEMS can be the suitable solution; though selection of materials for the different layers such as heaters, substrate etc remains a challenge. The material with low thermal expansion coefficient and better thermal distribution can be an optimal solution to achieve higher sensitivity. Additionally, to cope up with drifts which often take place at high temperature, metal electrodes made up of Fe, Ni, Co, T, and Platinum can be considered. The augmentation in Micro-heater geometry can also help achieving uniform thermal distribution over high temperature and hence can enable sensitive and reliable performance. To examine flow rate, displacement of a micro-fabricated paddle or fluidic gyroscope sensor can be considered. As MEMS fabrication semi-conductor material can be considered, which despite of high thermal expansion can enable cost-efficient solution. On the other hand, the use of metal electrodes as stated above can reduce thermal expansion and hence can achieve an optimal solution.
doi:10.17577/ijertv9is090300 fatcat:7fb4twdr75bk3psj4ary3cwy4e