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We have investigated the correlation between microstructure, DC resistivity and magnetoresistance of SrRuO 3 thin films. The films were epitaxially grown by pulsed laser deposition on (001) SrTiO 3 substrates in a temperature range of 690-810 0 C. According to x-ray measurements, the structure of all films is a mixture of highly oriented domains of strained orthorhombic phases (ortho-I and ortho-II) with different lattice parameters. Films deposited at 780 0 C show a minimum resistivity (270doi:10.1557/proc-751-z3.20 fatcat:4nhfb743rbgzne3ysnettjep4e