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2014 IEEE International Ultrasonics Symposium
We previously proposed venting the cavities of CMUTs for using them in environments with extreme pressure variation. Such CMUTs have zero differential pressure across the plate at any ambient pressure, thus ensuring a stable operating point and preventing mechanical failure. The air in the cavity between the moving CMUT plate and the substrate forms a squeeze film which gives some stiffening and damping effect to the CMUT. The additional damping from the squeeze film helps to enhance the CMUT'sdoi:10.1109/ultsym.2014.0042 fatcat:ttunklzj6vgm3mhwqe3rzihw2a