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THIN-FILM SENSOR ON BASIS ZnO
2014
Sensor Electronics and Microsystem Technologies
Àíîòàö³ÿ ÒÎÍÊÎÏ˲ÂÊÎÂÈÉ ÑÅÍÑÎÐ ÍÀ ÎÑÍβ ZnO Â. É. Ëàçîðåíêî, Ì. Å. Áóãàéîâà, Ã. Â. Ëàøêàðüîâ, À. Â. Áîðèñîâ, Â. Ì. Êîâàëü, Î. Ì. Øìèðüîâà Ãàçîâà ñåíñîðèêà º îäí³ºþ ç òèõ ãàëóçåé åëåêòðîí³êè, ùî îñòàíí³ì ÷àñîì íàéá³ëüø äè-íàì³÷íî ðîçâèâàºòüñÿ. Ïîòðåáà â ðîçðîáö³ ãàçîâèõ ñåíñîð³â îáóìîâëåíà íåîáõ³äí³ñòþ êîíòðîëþ åêîëîã³÷íîãî ñòàíó îòî÷óþ÷îãî ñåðåäîâèùà òà çàáåçïå÷åííÿ áåçïåêè aeèòòºä³ÿëüíîñò³ ëþäèíè. Íàï³âïðîâ³äíèêîâ³ ñåíñîðè º íàéá³ëüø ïåðñïåêòèâíèìè ãàçîâèìè ñåíñîðàìè, îñê³ëüêè âîíè ìàþòü ìàë³
doi:10.18524/1815-7459.2006.3.112585
fatcat:6aojeomx55gdpnw3tucozps6c4