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Miniature Ultrasonic and Tactile Sensors for Dexterous Robot
2012
Transactions on Electrical and Electronic Materials
Miniature ultrasonic and tactile sensors on Si substrate have been proposed, fabricated and characterized to detect objects for a dexterous robot. The ultrasonic sensor consists of piezoelectric PZT thin film on a Pt/Ti/SiO 2 and/or Si diaphragm fabricated using a micromachining technique; the ultrasonic sensor detects the piezoelectric voltage as an ultrasonic wave. The sensitivity has been enhanced by improving the device structure, and the resonant frequency in the array sensor has been
doi:10.4313/teem.2012.13.5.215
fatcat:xutzxw6yzvfnncjnzhfmh4t4ia