A 2.5D Integrated Voltage Regulator Using Coupled-Magnetic-Core Inductors on Silicon Interposer

Noah Sturcken, Eugene J. O'Sullivan, Naigang Wang, Philipp Herget, Bucknell C. Webb, Lubomyr T. Romankiw, Michele Petracca, Ryan Davies, Robert E. Fontana, Gary M. Decad, Ioannis Kymissis, Angel V. Peterchev (+3 others)
2013 IEEE Journal of Solid-State Circuits  
An integrated voltage regulator (IVR) is presented that uses custom fabricated thin-film magnetic power inductors. The inductors are fabricated on a silicon interposer and integrated with a multi-phase buck converter IC by 2.5D chip stacking. Several inductor design variations have been fabricated and tested. The best performance has been achieved with a set of eight coupled inductors that each occupies 0.245 and provides 12.5 nH with 270 DC. With early inductor prototypes, the IVR efficiency
more » ... r a 1.8 V:1.0 V conversion ratio peaks at 71% with FEOL current density of 10.8 and inductor current density of 1.53 . At maximum load current, 69% conversion efficiency and 1.8 V:1.2 V conversion ratio the FEOL current density reaches 22.6 and inductor current density reaches 3.21 .
doi:10.1109/jssc.2012.2221237 fatcat:alsqnamjnbf75fi2rq56hqhzqu