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Structural and optical characterization of size controlled silicon nanocrystals in SiO2/SiOxNy multilayers
We offer a complete structural and optical study of samples containing silicon nanocrystals (Si-NCs) embedded in SiO 2 /SiON multilayers, varying the oxynitride layer thickness from 2.5 to 7 nm. Using energy-filtered transmission electron microscopy we have determined the size distribution of the precipitated Si-nanoaggregates. Raman scattering measurements were used to investigate the Si-NC size and crystalline quality. By combining both techniques, the nanoaggregate crystalline degree hasdoi:10.1016/j.egypro.2011.10.150 fatcat:spyrxsngwrgq7mrfe2heet6ale