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SURFACE MORPHOLOGY OF GARNET FILMS DEPOSITED BY METALLO-ORGANIC
1996
Journal of the Magnetics Society of Japan
The d~:maence of.surfa<:e m0tp.hology of thin film garnets deposited by meta1Io-organic decomposition (MOD) on process conditions was mvestigated m an effort to produce MOD garnets with small roughness. The surface m?rphology of sputtered films were also studied for comparison. The surface morphologies were studied by atomic force mlcroscopy (~M) and cross-sectional electron microscopy. It was found that the surface morphology of the MOD films was very senSItive to mm deposition conditions such
doi:10.3379/jmsjmag.20.s1_357
fatcat:pmcl2jbxqvebbg6o2ykprmwsyi