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Effect of AlN Underlayer on Barium Ferrite Thin Films with Perpendicular Magnetic Anisotropy
磁性材料の化学 バリウムフェライト垂直磁気異方性膜に及ぼすAlN下地膜の効果
1998
Journal of the Japan Society of Powder and Powder Metallurgy
磁性材料の化学 バリウムフェライト垂直磁気異方性膜に及ぼすAlN下地膜の効果
Barium ferrite films were prepared by r.f. diode sputtering on AlN underlayers , and their crystal orientation and magnetic properties were investigated. The AIN underlayers , well oriented in c-axis, with the thickness of around
doi:10.2497/jjspm.45.82
fatcat:573wtbvyenbr5lnjtfgliwtv7a