Structure analysis was carried out on various surface features of diamond films using scanning electron microscopy (SEM) and atomic force microscopy (AFM). The films were grown via hot filament assisted chemical vapor deposition (HFCVD) in methane and hydrogen gas mixtures. We invesrigared the surfaces of films grown under parameters selected to produce certain textures or surface features such as penetration twins or hopper shaped faces. The SEM images of these films show that the { 100)

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... are usually flatter than the { 1 1 1 ). The ( 11 1 ) planes show interesting growth features. The "hopper" shaped structures were imaged in the tapping mode of the AFM, and the angles between planes and their orientations have been determined. These AFM and SEM images are presented with quantitative analyses of the exposed surfaces. Detailed quantitative information will be useful in understanding the growth of these films.