Thickness effects on the electrical characteristics of Ba0.7Sr0.3TiO3 capacitors with nano-Cr interlayer

Chia-Cheng Ho, Bi-Shiou Chiou, Li-Chun Chang
2007 Applied Physics Letters  
TiO 3 ͑BST/Cr/BST͒ structure was sputtered sequentially onto Pt/ Ti/ SiO 2 / Si substrate. With the insertion of a 2 nm Cr interlayer, the temperature coefficient of capacitance of the BST/Cr/BST dielectric is about 69% lower than that of BST monolayer dielectric. The dielectric constant and dissipation factor as the function of Cr thickness are studied. X-ray diffraction patterns, the analysis results of energy dispersive spectroscopy, and the survey scan profiles of Auger electron
more » ... reveal the formation of a TiO 2 secondary phase after the multilayer is annealed at 800°C in O 2 atmosphere. The insertion of nano-Cr interlayer improves the electrical properties of BST capacitors.
doi:10.1063/1.2717553 fatcat:zno575ebarhyjpnes7bu63o7vi