Joint Denoising and Distortion Correction for Atomic Column Detection in Scanning Transmission Electron Microscopy Images

Chenyu Zhang, Benjamin Berkels, Benedikt Wirth, Paul M. Voyles
2017 Microscopy and Microanalysis  
Atomic column positions in images of scanning transmission electron microscopy (STEM) contain important information about material structure and properties, but the precision with which those columns can be located is often limited by noise in the measured intensities and by scan distortion. Several previous works (e.g. [1-3]) have used post-processing methods on a series of STEM images to obtain single high signal-to-noise ratio, reduced distortion images. Then, from those images, precise
more » ... n positions can be obtained. These methods are effective, yielding precision in the position of atomic columns down below 1 pm [1], but at very high dose to the sample. Here, we propose an alternative approach that combines denoising and distortion correction, then directly identifies columns positions from noisy image series. A high-quality image is never generated to predict atomic column positions. We call this method joint denoising and distortion correction (JDDC).
doi:10.1017/s1431927617001507 fatcat:e5kg3g25jnf2bfv7oun74vaxrm