PMUTs Array with Dynamic Directivity: A Study of its Underwater Acoustic Power Intensity

Sina Sadeghpour, Michael Kraft, Robert Puers
2018 2018 IEEE International Ultrasonics Symposium (IUS)  
This paper presents the design and fabrication process of a PMUT array with adaptive directivity in order to study the beam pattern and acoustic power intensity of PMUT arrays. The proposed PMUT array consists of four 6 × 6, 8 × 8, 12×12, and a directional 6×6 arrays. Each array can be actuated separately. A detailed mathematical study, which is followed by FEM simulation, on directivity , beam pattern, and the acoustic power intensity is discussed. The fabricated array has resonance frequency
more » ... f 160 kHz underwater with 4 levels of directivity. The measurement results are compared with the analytical and simulation results.
doi:10.1109/ultsym.2018.8580115 fatcat:t535tl33vjfabl6ukncrjaepcu