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KEY WORDS. STM, LEED, LEED beam-profde analysis, !%(Ill), vicinal surface, stepped surface. SUMMARY LEED beam-profile and STM measurements have been used in combination to study the ordering of stepped Si( 11 1) surfaces misoriented by 4" toward the [ill] direction. LEED measurements show that ordering of the surface steps is dependent on the thermal history of the sample, but give little clue about the reasons. An initial cleaning at 1250°C followed by slow cooling is required to obtain adoi:10.1111/j.1365-2818.1870.tb06070.x fatcat:5upkuf2dgfeqlkih6myjbltcoy