Design, fabrication and measurements with a UV linear-variable optical filter microspectrometer

Arvin Emadi, Huaiwen Wu, Ger de Graaf, Peter Enoksson, José Higino Correia, Reinoud Wolffenbuttel, Francis Berghmans, Anna G. Mignani, Piet De Moor
2012 Optical Sensing and Detection II  
An IC-Compatible Linear-Variable Optical Filter (LVOF) for application in the UV spectral range between 310 nm and 400 nm has been fabricated using resist reflow and an optimized dry-etching. The LVOF is mounted on the top of a commercially available CMOS camera to result in a UV microspectrometer. A special calibration technique has been employed that is based on an initial spectral measurement on a Xenon lamp. The image recorded on the camera during calibration is used in a signal processing
more » ... signal processing algorithm to reconstruct the spectrum of the Mercury lamp and the calibration data is subsequently used in UV spectral measurements. Experiments on fabricated LVOF-based microspectrometer with this calibration approach implemented reveal a spectral resolution of 0.5 nm.
doi:10.1117/12.922374 fatcat:uyf747vadzbdbaqqdndhfdwkbq