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17th IEEE International Conference on Micro Electro Mechanical Systems. Maastricht MEMS 2004 Technical Digest
A parylene-MEMS ion-exchange Liquid Chromatography (LC) chip is presented here. The chip is integrated with microfluidic I/O ports, a separation column, frits/filters, and a conductivity detector. The column is packed with conventional LC stationary phase support materials, i.e. micro-beads with surface functional groups. To withstand high pressure normally encountered in High Performance Liquid Chromatography (HPLC), a self-aligned, channelanchoring technique is developed to increase thedoi:10.1109/mems.2004.1290560 fatcat:mxlzuvsprjfkjozfqekdadwrfm