Ion liquid chromatography on-a-chip with beads-packed parylene column

Qing He, Changlin Pang, Yu-Chong Tai, T.D. Lee
17th IEEE International Conference on Micro Electro Mechanical Systems. Maastricht MEMS 2004 Technical Digest  
A parylene-MEMS ion-exchange Liquid Chromatography (LC) chip is presented here. The chip is integrated with microfluidic I/O ports, a separation column, frits/filters, and a conductivity detector. The column is packed with conventional LC stationary phase support materials, i.e. micro-beads with surface functional groups. To withstand high pressure normally encountered in High Performance Liquid Chromatography (HPLC), a self-aligned, channelanchoring technique is developed to increase the
more » ... increase the pressure rating of the Parylene microfluidic devices from 30 to at least 800psi. On-chip injection, separation and detection of anions in water, with ~25ppm concentration, have been successfully demonstrated. To our knowledge, this is the first demonstration of microbeads-packed column ion liquid chromatography (LC) on a chip.
doi:10.1109/mems.2004.1290560 fatcat:mxlzuvsprjfkjozfqekdadwrfm