A copy of this work was available on the public web and has been preserved in the Wayback Machine. The capture dates from 2021; you can also visit the original URL.
The file type is application/pdf
.
A thin-film temperature sensor based on a flexible electrode and substrate
2021
Microsystems & Nanoengineering
AbstractAccurate temperature measurements can efficiently solve numerous critical problems and provide key information. Herein, a flexible micro-three-dimensional sensor, with a combination of platinum and indium oxide to form thermocouples, is designed and fabricated by a microfabrication process to achieve in situ real-time temperature measurements. The stability and reliability of the sensor are greatly improved by optimizing the process parameters, structural design, and preparation
doi:10.1038/s41378-021-00271-0
pmid:34094587
pmcid:PMC8166532
fatcat:qxrnfpm7k5gphk2xftfsjkuxxy