Precise determination of absolute coverage of thin films by layer-resolved surface states

Cheng-Maw Cheng, Ku-Ding Tsuei, Chi-Ting Tsai, Dah-An Luh
2008 Applied Physics Letters  
We report a technique to determine the coverage of metallic thin films by analyzing layer-resolved surface states with photoemission by using atomically flat Ag/ Au͑111͒ thin films as a test system. We analyzed the surface state on Au͑111͒ covered with Ag up to 4 ML with atomic resolution, and precisely determined the total Ag coverage of Ag/ Au͑111͒ through a line-shape analysis. With precise measurements of the absolute coverage of thin films becoming possible, one can calibrate the tooling factor of evaporators with unprecedented accuracy.
doi:10.1063/1.2916820 fatcat:t2iyx6iybrabla7gog237ummsq