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The International Conference on Photonics and Optical Engineering (icPOE 2014)
Fast, precise 3-D measurement of step-structures fabricated on microelectronic products is essential for quality assurance of semiconductor, flat panel display and photovoltaic products. Optical interferometers have long been used, but not that wide-spread for step-structures due to their phase ambiguity or low spatial coherence. Femtosecond pulse lasers can provide novel possibilities to optical profilometry both in the time and the frequency domain. In the time domain, stepsurfaces can bedoi:10.1117/12.2083260 fatcat:mwb4neatofavfmjn7xwikucaxa