A copy of this work was available on the public web and has been preserved in the Wayback Machine. The capture dates from 2020; you can also visit the original URL.
The file type is
Switch-off time of a micromachined capacitive microswitch is commonly estimated by the quarter of the period corresponding to the lowest eigenfrequency of the vibrating membrane. It has been calculated by a quasianalytical method taken intő account the damping effect of a squeeze-film between the two plates of the capacitor. Several damping models are known to define an equivalent damping paraméter. These models, however, lead to very different responses. The comparison of the methods showsdoi:10.36243/fmtu-2004.06 fatcat:xdmfe3ckyvasfarmw6i2urbdgu