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Two-Photon Laser Lithography of photonic microstructures in photoresist SU-8
2005 Pacific Rim Conference on Lasers & Electro-Optics
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High quality three-dimensional micro-and nano-structures were fabricated in photoresist SU-8 by two-photon laser lithography. Extended periodic microstructures with so-called woodpile architecture are demonstrated to have good quality and exhibit fundamental and higher-order photonic stop-gaps in the infrared wavelength range of 2.0-8.0 µm. These SU-8 structures can be used as photonic crystal templates suitable for infiltration by high refractive index materials. To illustrate the resolution
doi:10.1109/cleopr.2005.1569871
fatcat:vs4jar2uyvhs5bbla7dr65sqsa