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Lateral resolution and instrument transfer function as criteria for selecting surface metrology instruments
2012
Imaging and Applied Optics Technical Papers
unpublished
Preserved Fulltext
We review definitions of optical resolution and how they relate to the Instrument Transfer Function of surface profiling interferometers. The corresponding optical cutoff provides a selection criterion for a given metrology application (PSD, waviness).
doi:10.1364/oft.2012.otu1d.4
fatcat:ttlfylqwpfa3zaadpbh4nc45tq