Submonolayer Growth with Anomalously High Island Density in Hyperthermal Deposition

I. T. Koponen, M. O. Jahma, M. Rusanen, T. Ala-Nissila
2004 Physical Review Letters  
We present a rate equation model for submonolayer island growth under conditions where hyperthermal deposition techniques such as low-energy ion deposition are employed to achieve smooth layerby-layer growth. By asymptotic analysis, we demonstrate that the model exhibits stationary behavior with well-defined dynamic and growth exponents and , respectively, in the limit of small and high detachment rates. We verify these predictions by using the particle coalescence simulation method. The
more » ... ions reveal the existence of a relatively sharp transition regime with an increasing detachment rate of adatoms from high values of the growth exponent 1 to much smaller values of determined by detachment and island diffusion processes. Our numerical results for the island size distribution indicate an anomalously high number of small islands, in agreement with available experimental data.
doi:10.1103/physrevlett.92.086103 pmid:14995796 fatcat:eklayiygqnffdln6bibo2rxaai