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In this paper, we present the development of an inductively coupled mini RFID transponder using MEMS technology for implantable wireless sensor applications. The transponder (approximately 25 mm 3 in volume) consists of a small solenoid inductor with a high-permeability magnetic core (dia = 750 m), a chip capacitor and a RFID chip. They are integrated onto a micromachined SU8 polymer substrate and it is operated in the frequency range of 13.56-27 MHz. Voltages up to 4 V were obtained at a smalldoi:10.1109/tmag.2007.893802 fatcat:5uvhsmpp7zgr3arufrkxno7uxu