Preparation of AlN Powders by Vapor Phase Reaction of Al(i-Bu)3-NH3 System
Al(i-Bu)3-NH3系気相反応によるAlN微粉体の合成

Kiyoshi TSUCHIDA, Yukitoshi TAKESHITA, Akira YAMANE, Akio KATO
1987 Journal of the Ceramic Association Japan  
doi:10.2109/jcersj1950.95.1108_1198 fatcat:5ly4nq7v4bhebin6qs2w2ewx7m