Finite Ground Coplanar Lines on CMOS Grade Silicon with a Thick Embedded Silicon Oxide Layer Using Micromachining Techniques

Guoan Wang, Andrew Bacon, Reza Abdolvand, Farrokh Ayazi, John Papapolymerou, Emmanouil M. Tentzeris
2003 33rd European Microwave Conference, 2003  
Finite Ground Coplanar (FGC) waveguide transmission lines on CMOS grade silicon wafer (p<O.Ol ohm-cm) with a thick embedded silicon oxide layer have been developed using micromachining techniques. Lines with different lengths were designed, fabricated and measured. Measured attenuation and s-parameters are presented in the paper. Results show that the attenuation loss of the fabricated FGC lines is as low us 3.2 dB/cm at 40 GHL
doi:10.1109/euma.2003.340817 fatcat:irlgzmepanh77fkdfay7rpohsi