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33rd European Microwave Conference, 2003
Finite Ground Coplanar (FGC) waveguide transmission lines on CMOS grade silicon wafer (p<O.Ol ohm-cm) with a thick embedded silicon oxide layer have been developed using micromachining techniques. Lines with different lengths were designed, fabricated and measured. Measured attenuation and s-parameters are presented in the paper. Results show that the attenuation loss of the fabricated FGC lines is as low us 3.2 dB/cm at 40 GHLdoi:10.1109/euma.2003.340817 fatcat:irlgzmepanh77fkdfay7rpohsi