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Study on the deposition of aluminum-doped zinc oxide films using direct-current pulse magnetron reactive sputtering technique
Aluminum-doped zinc oxide (AZO) films have potential applications in photoconducting and piezo-electric devices, and gas and piezo sensors. Although the film structure and optical properties are intensively studied, the effect of gas flow ratio of O2 to Ar (GFR) on the film structure and optical properties has not been reported in terms of macrostress and lattice strain. In this paper, a series of AZO films is deposited on glass substrates by direct-current pulse magnetron reactive sputteringdoi:10.7498/aps.61.036104 fatcat:rtoopnxvlfapzevltpifjgfiym