Energy measurement of energetic particles bombarding films during sputtering of ZnO and their influence on growing films
酸化亜鉛のスパッタリングにおける高速粒子のエネルギー評価とその成長膜への影響

Kikuo TOMINAGA, Yoshihiro SHINTANI
1993 Oyobuturi  
doi:10.11470/oubutsu1932.62.1230 fatcat:q6hu7w6bgfgzpdqsk7rz6kl6h4