A copy of this work was available on the public web and has been preserved in the Wayback Machine. The capture dates from 2018; you can also visit the original URL.
The file type is application/pdf.
Crystal structure of Ti thin film deposited by facing targets sputtering
対向ターゲット式スパッタ法によるTi薄膜の結晶構造
1989
Journal of The Surface Finishing Society of Japan
対向ターゲット式スパッタ法によるTi薄膜の結晶構造
Preserved Fulltext
