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Atomic layer deposition of AlN from AlCl3 using NH3 and Ar/NH3 plasma

Ville Rontu, Perttu Sippola, Mikael Broas, Glenn Ross, Timo Sajavaara, Harri Lipsanen, Mervi Paulasto-Kröckel, Sami Franssila
2018 Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films  

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doi:10.1116/1.5003381 fatcat:bl4w5zgjyzchvlkxtnb6e5b2qa
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Ville Rontu, Perttu Sippola, Mikael Broas, Glenn Ross, Timo Sajavaara, Harri Lipsanen, Mervi Paulasto-Kröckel, Sami Franssila. "Atomic layer deposition of AlN from AlCl3 using NH3 and Ar/NH3 plasma." Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films 36.2 (2018) 021508