Existing and Envisioned Control Environment for Semiconductor Manufacturing [chapter]

2018 Run-to-Run Control in Semiconductor Manufacturing  
The goal of this book is to provide a practical guide to the understanding, implementation, and use of run-to-run (R2R) control in semiconductor manufacturing as well as manufacturing in general. The target audience is intentionally wide and includes technology directors and strategists, technical managers, control engineers, process engineers, systems designers, integrators, and users. The aim of the authors is to provide insight into the development, integration, application, enhancement, and
more » ... operation of R2R control. In addition, the book points to new directions in R2R process control, some of which have only recently been discussed in the literature. These directions point to avenues of opportunity for developing even more effective R2R control strategies for the fabricator of the future.
doi:10.1201/9781420040661-13 fatcat:vhbchl74tza4zatjxtp7v2gv6y