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Existing and Envisioned Control Environment for Semiconductor Manufacturing
[chapter]
2018
Run-to-Run Control in Semiconductor Manufacturing
The goal of this book is to provide a practical guide to the understanding, implementation, and use of run-to-run (R2R) control in semiconductor manufacturing as well as manufacturing in general. The target audience is intentionally wide and includes technology directors and strategists, technical managers, control engineers, process engineers, systems designers, integrators, and users. The aim of the authors is to provide insight into the development, integration, application, enhancement, and
doi:10.1201/9781420040661-13
fatcat:vhbchl74tza4zatjxtp7v2gv6y