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Wafer-Scale and Deterministic Patterned Growth of Monolayer MoS2 via Vapor-Liquid-Solid Method

Shisheng Li, Yung-Chang Lin, Xuying Liu, Zehua Hu, Song Liu, Hideaki Nakajima, Toshiya Okazaki, Jing Wu, Wei Chen, Takeo Minari, Yoshiki Sakuma, Kazuhito Tsukagoshi (+3 others)
2019 Nanoscale  

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2019 pre-print arXiv:1906.05436v1 fatcat:lfo7zjzoyzf7rlm4pplkrsopge

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2019 accepted
arXiv:1906.05436v2 fatcat:zmc4kpvdzbgybjopwloy6py7fm
Vapor transportation is the core process in growing transition-metal dichalcogenides (TMDCs) by chemical vapor deposition (CVD). One inevitable problem is the spatial inhomogeneity of the vapors. The non-stoichiometric supply of...
doi:10.1039/c9nr04612g fatcat:knbgbphnl5fu5hssgzxphhw2uq
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Shisheng Li, Yung-Chang Lin, Xuying Liu, Zehua Hu, Song Liu, Hideaki Nakajima, Toshiya Okazaki, Jing Wu, Wei Chen, Takeo Minari, Yoshiki Sakuma, Kazuhito Tsukagoshi, Kazu Suenaga, Takaaki Taniguchi, Minoru Osada. "Wafer-Scale and Deterministic Patterned Growth of Monolayer MoS2 via Vapor-Liquid-Solid Method." Nanoscale 11.34 (2019)