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1998 Solid-State, Actuators, and Microsystems Workshop Technical Digest
This paper reports a high-speed capacitive humidity sensor with an integrated boron-diffused heater. A response time of 1.0sec and a sensitivity of 30.0fF/%RH have been obtained with the fabricated devices. High speed is achieved using multiple polyimide columns having diameters of a few microns and allowing moisture to diffuse into them circumfer entially, altering the dielectric constant. A subsecond response time is expected when the geometry is further reduced. The purpose of the heater isdoi:10.31438/trf.hh1998.40 fatcat:f2ma4luqsrfhxeolvpgx4enrea