Foundry Development of System-On-Chip InP-based Photonic Integrated Circuits

Gloria E. Hoefler, Yuchun Zhou, Maria Anagnosti, Ashish Bhardwaj, Payam Abolghasem, Adam James, Shawn Luna, Peter Debackere, Andrew Dentai, Thomas Vallaitis, Paul Liu, Mark Missey (+9 others)
2019 IEEE Journal of Selected Topics in Quantum Electronics  
We review the state-of-the-art in monolithicintegrated InP-based system-on-chip (SOC) photonic integrated circuits (PICs) and the extension of this capability to a foundry offering. The learnings and best practices embodied in the design and fabrication capability of commercially deployed monolithically integrated coherent optical communication SOC are leveraged to develop an optimized and scalable integration platform for a turnkey foundry process. The design automation and infrastructure
more » ... red to enable a consistent reproducible InP-based foundry offering is summarized. Index Terms-Indium-phosphide, PIC foundries, photonic integrated circuits, III-V.
doi:10.1109/jstqe.2019.2906270 fatcat:2ei34lpmbfhm3edlamtkik5fb4