Vacuum Systems Laboratory Development: Teaching More About Making Less

David M. Hata
1998 Annual Conference Proceedings   unpublished
The implementation of new associate degree programs in semiconductor manufacturing at community colleges across the nation has created a critical need for vacuum technology courses and supporting laboratories. Unfortunately, few resources have been available to support technology-level courses in vacuum systems. This paper describes the results of a two-year project to develop a vacuum technology course, implement a vacuum systems laboratory, and provide faculty enhancement activities.
doi:10.18260/1-2--7518 fatcat:sxtvglk6njcyfbexptjslxifm4