In this paper, we describe the phenomena in semiconductor fabrication which are important for production scheduling. We focus our attention on collecting and understanding events, and describing related concepts, such as fabrication processes, operation sets, production machines, support machines, accessories, operation worker, support technicians, activities, objectives, etc. We do not suggest scheduling policies here; instead the goal is to characterize all the events that must be considered

more »

... n developing such a policy. -" Microsystems Massachusetts Cambridge Telephone Research Center Institute Massachusetts ;617) 253-8138 Room 39-321 of Technology 02139 Acknowledgements Abstract In this paper, we describe the phenomena in semiconductor fabrication which are important for production scheduling. We focus our attention on collecting and understanding events, and describing related concepts, such as fabrication processes, operation sets, production machines, support machines, accessories, operation workers, support technicians, activities, objectives, etc. We do not suggest scheduling policies here; instead the goal is to characterize all the events that must be considered in developing such a policy.