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2006 Solid-State, Actuators, and Microsystems Workshop Technical Digest
This paper describes a cantilever beam pull-in voltage model in terms of beam length, thickness, initial dielectric gap, and beam material Young's modulus. A closed form beam deflection model is described for use with voltage actuated MEMS cantilever beams via an underlying mechanically fixed electrode. Electrostatic force is summed over the deflected cantilever beam using a function integrated over beam length evaluated from anchor to beam tip. The net electrostatic moment is applied normal todoi:10.31438/trf.hh2006.97 fatcat:kpgqcf2wm5gxtdud3fmytlujri