G.J. O'Brien, D. Monk, L. Lin
2006 2006 Solid-State, Actuators, and Microsystems Workshop Technical Digest   unpublished
This paper describes a cantilever beam pull-in voltage model in terms of beam length, thickness, initial dielectric gap, and beam material Young's modulus. A closed form beam deflection model is described for use with voltage actuated MEMS cantilever beams via an underlying mechanically fixed electrode. Electrostatic force is summed over the deflected cantilever beam using a function integrated over beam length evaluated from anchor to beam tip. The net electrostatic moment is applied normal to
more » ... the cantilever beam tip as a function of the deformed beam displacement angle. The proposed model consistently predicted pull-in voltage with less error, when compared to empirical and simulated results, than previously reported theoretical models without the use of empirical correction factors. Pull-in voltage model prediction was improved by over 12% when compared to a previously described theoretical model using polysilicon cantilever beam latch measurements as a reference.
doi:10.31438/trf.hh2006.97 fatcat:kpgqcf2wm5gxtdud3fmytlujri