Co-doping with antimony to control phosphorous diffusion in germanium

H. A. Tahini, A. Chroneos, R. W. Grimes, U. Schwingenschlögl
2013 Journal of Applied Physics  
In germanium, phosphorous and antimony diffuse quickly and as such their transport must be controlled in order to design efficient n-typed doped regions. Here, density functional theory based calculations are used to predict the influence of double donor co-doping on the migration activation energies of vacancy-mediated diffusion processes. The migration energy barriers for phosphorous and antimony were found to be increased significantly when larger clusters involving two donor atoms and a
more » ... ncy were formed. These clusters are energetically stable and can lead to the formation of even larger clusters involving a number of donor atoms around a vacancy, thereby affecting the properties of devices. V C 2013 American Institute of Physics. [http://dx.
doi:10.1063/1.4792480 fatcat:cv7dj6ivvfbmvbsktyimfnctgq