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Surface roughness of NaCl coating used as release layers in thin film production
Journal of Physics, Conference Series
Surface roughness scans of NaCl (salt) coatings on silicon wafers were carried out using an Atomic Force Microscope. Metrology was carried out on single layer salt and also salt coated with a thin aluminium layer which is a representative high power laser target. All were characterised straight from vacuum and again after being exposed to the atmosphere for a few days. Results suggest that the surface roughness increased drastically after being left in atmospheric conditions for few days. Thedoi:10.1088/1742-6596/1079/1/012017 fatcat:nlv7njkoc5fs3frfjan2g6yuiq