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High-Precision XY Stage Motion Control of Industrial Microscope
IEEE transactions on industrial electronics (1982. Print)
This paper presents an economic way to implement a high precision (µm level) XY stage motion control for the industrial microscope using DC motors. Other than the prevailing design of using stepper motors where the stage is always locked under the motorized mode, the proposed design allows users to manually move the stage by introducing the friction engagement in between. The nonlinearity from the friction is then fully compensated by the sliding mode control (SMC) so that the stage candoi:10.1109/tie.2018.2838102 fatcat:eijdsoy7r5gddocnpm526xw5sm