High-Precision XY Stage Motion Control of Industrial Microscope

Li Hong Idris Lim, Dazhi Yang
2018 IEEE transactions on industrial electronics (1982. Print)  
This paper presents an economic way to implement a high precision (µm level) XY stage motion control for the industrial microscope using DC motors. Other than the prevailing design of using stepper motors where the stage is always locked under the motorized mode, the proposed design allows users to manually move the stage by introducing the friction engagement in between. The nonlinearity from the friction is then fully compensated by the sliding mode control (SMC) so that the stage can
more » ... follow the predefined motion profile. Possible chattering suppression methods are discussed and the accuracy loss is analyzed using LuGre friction model. Finetuning algorithm is then proposed to limit the position error within ±2 µm. Comparing to the other µm-level industrial microscopes using stepper motors, the proposed solution achieves comparable performance with much lower costs.
doi:10.1109/tie.2018.2838102 fatcat:eijdsoy7r5gddocnpm526xw5sm